ACCESSORY 1 | Rotary Tables |
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ACCESSORY 2 | Vibration Isolation |
ACCESSORY 3 | 2-dimensional Analysis Software - FORMTRACEPAK-AP |
X/Y MACHINE ACCURACY | X/Y Axis: (2.2+0.02L) μm |
Z MACHINE ACCURACY | Depends on measuring microscope |
SCALE RESOLUTION | 0.1 μm |
SOFTWARE PACKAGE | QSPAK |
TECHNICAL SPECS 1
The ultra-high speed AF function has been installed to allow focusing on a surface to be measured at a speed of about one second. Freedom from burdensome focus adjustment even on a workpiece with many asperities allows the operator to perform stress-free measurement, drastically reducing operator's fatigue.
TECHNICAL SPECS 2
The concurrent use of the vision unit as a vision measurement system allows simplified measurement of an edge by merely one click. Moreover, since many data points can be obtained at a time with just one click, this will drastically speed up measurement and reduce data spread compared with the conventional method of "measuring data points one by one with cross hairs".
TECHNICAL SPECS 3
This series is equipped with a manual stage that provides intuitive positioning and has a quick release function that enables rapid movement between measuring points that are a large distance apart.
X/Y MEASUREMENT CAPACITIES
Depends on measuring microscope
Z-AXIS MEASUREMENT CAPACITIES
Depends on measuring microscope
NOTE
Mitutoyo offers a choice of stage size from 100×100 mm to maximum-inclass 400×200 mm.